Efficient AMHS Solutions
It automates transport and storage in semiconductor fabs, ensuring precise FOUP handling,
optimized space utilization, and seamless system for stable and efficient operations.
OHT (Overhead Hoist Transfer)
This overhead automated transport system handles the automatic transfer of FOUPs
in semiconductor processes. It integrates seamlessly with Stockers/EQ using the E84 standard communication
protocol for semiconductor equipment and complies with SEMI standards, ensuring smooth data interaction with
higher-level systems. The system uses contactless power supply to meet cleanroom requirements, achieving
Class 100 cleanliness standards.
Lifter
The Lifter plays a key role in transferring silicon wafers between different floors in semiconductor production.
Through advanced automation, it ensures fast, precise, and efficient operations, significantly reducing the reliance on manual labor and minimizing errors in the production process. The Lifter can seamlessly integrate with other AMHS equipment, including conveyor and storage systems, to form a fully automated logistics network. A central control system manages these integrations, enabling complete automation of production lines. The AMHS Lifter is an indispensable part of modern semiconductor manufacturing, offering enhanced efficiency, reliability, and production quality.
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